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vertical scanning or coherence probe interferometers. white light scatter-plate interferometers. While all three of these interferometers work with a white light source, only the first, the diffraction grating interferometer, is truly achromatic. [8] Here the vertical scanning or coherence probe interferometers are discussed in detail due to ...
Figure 3. White light interferometric microscope. White-light interferometry scanning (WLS) systems capture intensity data at a series of positions along the vertical axis, determining where the surface is located by using the shape of the white-light interferogram, the localized phase of the interferogram, or a combination of both shape and phase.
White light interferometry is commonly used for detecting deformations of the wafer surface based on optical measurements. Low-coherence light from a white light source passes through the optical top wafer, e.g. glass wafer, to the bond interface. Usually there are three different white light interferometers: diffraction grating interferometers
DHM performs static measurements of 3D surface topography as many other 3D optical profilometers (white light interferometers, confocal, focus variation, ... ). It enables to retrieve, roughness and shape of many surfaces. [32] [33] [34] Use of multiple wavelengths enable to overcome the l/4 limit of traditional phase shifting interferometers ...
The signal can be acquired with a camera in wide-field operation (a, b) or by point detection in confocal arrangement (c, d). Interferometric scattering microscopy (iSCAT) refers to a class of methods that detect and image a subwavelength object by interfering the light scattered by it with a
Diffraction-grating interferometer (white light) Double-slit interferometer; Dual-polarization interferometry; Fabry–Pérot interferometer; Fizeau interferometer; Fourier-transform interferometer; Fresnel interferometer (e.g. Fresnel biprism, Fresnel mirror or Lloyd's mirror) Fringes of Equal Chromatic Order interferometer (FECO) Gabor hologram